Items where Author is "Yukimura, K."
Number of items: 1.
YUKIMURA, K. and EHIASARIAN, A. P.
(2009).
Generation of RF plasma assisted high power pulsed sputtering glow discharge without using a magnetic field.
Nuclear Instruments and Methods in Physics Research. Section B-Beam Interactions with Materials and Atoms, 267 (8-9), 1701-1704.
[Article]