Items where Author is "Yukimura, K."
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Article
YUKIMURA, K. and EHIASARIAN, A. P.
(2009).
Generation of RF plasma assisted high power pulsed sputtering glow discharge without using a magnetic field.
Nuclear Instruments and Methods in Physics Research. Section B-Beam Interactions with Materials and Atoms, 267 (8-9), 1701-1704.