Fabrication of plasmonic transition metal nitride thin films and nano-arrays [abstract only]

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BOWER, R, MUIR, E, KERHERVE, G, RENTE, B, EHIASARIAN, Arutiun and PETROV, PK (2025). Fabrication of plasmonic transition metal nitride thin films and nano-arrays [abstract only]. International Conference on Metamaterials Photonic Crystals and Plasmonics, 340-341. [Article]

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Abstract

Transition metal nitrides (TMNs), have emerged as promising alternative plasmonic materials, displaying spectral tunability, thermal stability and mechanical stability. This work reports the CMOS compatible deposition of plasmonic TMN films at low temperature. We also describe dry etching methods for the scalable production of TMN metamaterial nano-arrays.

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Official URL:

https://metaconferences.org/META25/files/meta25_pr...

Contributors:

Editor - Mnaymneh, Khaled
Editor - Zouhdi, Said

Page Range:

340-341

Identifiers

ORCID for Arutiun Ehiasarian: