EHIASARIAN, Arutiun, ANDERSSON, Joakim and ANDERS, André (2010). Distance-dependent plasma composition and ion energy in high power impulse magnetron sputtering. Journal of Physics D: Applied Physics, 43 (27), p. 275204.
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Link to published version:: https://doi.org/10.1088/0022-3727/43/27/275204
Item Type: | Article |
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Research Institute, Centre or Group - Does NOT include content added after October 2018: | Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Nanotechnology Centre for PVD Research |
Identification Number: | https://doi.org/10.1088/0022-3727/43/27/275204 |
Page Range: | p. 275204 |
Depositing User: | Ann Betterton |
Date Deposited: | 12 Jul 2010 14:25 |
Last Modified: | 18 Mar 2021 21:15 |
URI: | https://shura.shu.ac.uk/id/eprint/2329 |
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