BARROS, S. O., STEVENS, R., THOMAS, C. B., CRANTON, Wayne and CRAVEN, M. (2001). Ion milling properties of laterally emitting thin-film electroluminescent materials. IEEE Transactions on Semiconductor Manufacturing, 14 (2), 173-176.
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Official URL: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?...
Link to published version:: https://doi.org/10.1109/66.920730
Abstract
A study has been undertaken of the ion milling properties of ZnS:Mn, Y2O3, Si3N4, SiO2, SiOxNy, and Al versus the etching time, the acceleration voltage, and the angle of incidence of the ion beam. Different ZnS:Mn etched profiles have been fabricated by modifying the angle of incidence; these are in agreement with the reported simulations
Item Type: | Article |
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Research Institute, Centre or Group - Does NOT include content added after October 2018: | Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Electronic Materials and Sensors Research Group |
Identification Number: | https://doi.org/10.1109/66.920730 |
Page Range: | 173-176 |
Depositing User: | Wayne Cranton |
Date Deposited: | 04 Feb 2016 11:49 |
Last Modified: | 18 Mar 2021 23:00 |
URI: | https://shura.shu.ac.uk/id/eprint/7996 |
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