Effect of the degree of high power impulse magnetron sputtering (HIPIMS) utilisation on the corrosion properties of TiN films

SUGUMARAN, A.A., PURANDARE, Yashodhan, MANDAL, P., EHIASARIAN, A.P. and HOVSEPIAN, Papken (2013). Effect of the degree of high power impulse magnetron sputtering (HIPIMS) utilisation on the corrosion properties of TiN films. In: Society of Vacuum Coaters 505/856-7188. 56th Annual Technical Conference Proceedings,. Society of Vacuum Coaters.

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Item Type: Book Section
Additional Information: Society of Vacuum Coaters 505/856-7188 56th Annual Technical Conference, Providence, RI April 20–25
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre
Depositing User: Jill Hazard
Date Deposited: 10 Mar 2014 10:09
Last Modified: 18 Mar 2016 12:55
URI: http://shura.shu.ac.uk/id/eprint/7821

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