Effect of the degree of high power impulse magnetron sputtering (HIPIMS) utilisation on the corrosion properties of TiN films

SUGUMARAN, A.A., PURANDARE, Yashodhan, MANDAL, P., EHIASARIAN, A.P. and HOVSEPIAN, Papken (2013). Effect of the degree of high power impulse magnetron sputtering (HIPIMS) utilisation on the corrosion properties of TiN films. In: Society of Vacuum Coaters 505/856-7188. 56th Annual Technical Conference Proceedings,. Society of Vacuum Coaters. [Book Section]

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