Chapter 2: fundamentals and applications of HIPIMS

High Power Impulse Magnetron Sputtering (HIPIMS) has been introduced in the late 1990s as a unique physical vapor deposition method. The technology utilizes magnetron sputtering cathodes and high peak power density of 3 kWcm-2 on the target. The plasma produces a metal flux with high degree of ionization. HIPIMS has been successfully used as a substrate pretreatment method to enhance coating adhesion by promoting local epitaxial growth. As a deposition technology, HIPIMS produces high density microstructure films. It has been industrialized and has successful applications in hard coatings, electronic coatings and optical coatings.