Distance-dependent plasma composition and ion energy in high power impulse magnetron sputtering

EHIASARIAN, Arutiun, ANDERSSON, Joakim and ANDERS, André (2010). Distance-dependent plasma composition and ion energy in high power impulse magnetron sputtering. Journal of Physics D: Applied Physics, 43 (27), p. 275204.

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Link to published version:: 10.1088/0022-3727/43/27/275204
Item Type: Article
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number: 10.1088/0022-3727/43/27/275204
Depositing User: Ann Betterton
Date Deposited: 12 Jul 2010 15:25
Last Modified: 12 Jul 2010 15:25
URI: http://shura.shu.ac.uk/id/eprint/2329

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