Low temperature remote plasma sputtering of indium tin oxide for flexible display applications

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WAKEHAM, S. J., THWAITES, M. J., HOLTON, B. W., TSAKONAS, C., CRANTON, Wayne, KOUTSOGEORGIS, D. C. and RANSON, R. (2009). Low temperature remote plasma sputtering of indium tin oxide for flexible display applications. Thin Solid Films, 518 (4), 1355-1358. [Article]

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Official URL:

http://www.scopus.com/inward/record.url?eid=2-s2.0...

Additional Information:

Cited By (since 1996):19 ID=177

Research Institute, Centre or Group - Does NOT include content added after October 2018:

Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Electronic Materials and Sensors Research Group

Page Range:

1355-1358

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Identification Number:

10.1016/j.tsf.2009.04.072

ORCID:

https://orcid.org/0000-0002-0142-7810

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Item Type:

Article

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Date Deposited:

01 Jun 2016 13:55

Last Modified:

18 Mar 2021 19:15

URI:

https://shura.shu.ac.uk/id/eprint/8057

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