The effects of KrF pulsed laser and thermal annealing on the crystallinity and surface morphology of radiofrequency magnetron sputtered ZnS:Mn thin films deposited on Si

MASTIO, E. A., CRAVEN, M. R., CRANTON, Wayne, THOMAS, C. B., ROBINO, M. and FOGARASSY, E. (1999). The effects of KrF pulsed laser and thermal annealing on the crystallinity and surface morphology of radiofrequency magnetron sputtered ZnS:Mn thin films deposited on Si. Journal of Applied Physics, 86 (5), 2562-2570. [Article]

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