Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics

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CRANTON, W. M., WILSON, S. L., RANSON, R., KOUTSOGEORGIS, D. C., CHI, K., HEDGLEY, R., SCOTT, J., LIPIEC, S., SPILLER, A. and SPEAKMAN, S. (2007). Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics. Thin Solid Films, 515 (24 SPE), 8534-8538. [Article]

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Abstract

The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20–100 mJ cm− 2 reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions.

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http://www.scopus.com/inward/record.url?eid=2-s2.0...

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Cited By (since 1996):16 ID=181

Research Institute, Centre or Group - Does NOT include content added after October 2018:

Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Electronic Materials and Sensors Research Group

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8534-8538

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Identification Number:

10.1016/j.tsf.2007.03.118