Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

LEWIN, Erik, LOCH, Daniel, MONTAGNE, Alex, EHIASARIAN, Arutiun P. and PATSCHEIDER, Jörg (2013). Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering. Surface and coatings technology, 232, 680-689. [Article]

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