Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy

HILLIER, James Arthur, PATSALAS, Panos, KARFARDIS, Dimitrios, CRANTON, Wayne, NABOK, Alexi V, MELLOR, Christopher J, KOUTSOGEORGIS, Demosthenes C and KALFAGIANNIS, Nikolaos (2022). Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy. Optical Materials Express, 12 (11), p. 4310.

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Abstract

The mechanisms governing the modification of the optoelectronic properties of low carrier concentration indium tin oxide (ITO) during reactive laser annealing (ReLaA) are investigated. ReLA combines the advantages of reactive ambient thermal annealing and laser annealing; utilizing laser processing of room-temperature sputtered ITO thin films in pressurized reactive environments to probe the films’ crystal structure and defect composition. Advanced ellipsometric modelling (considering depth-inhomogeneity and intra- and inter-grain carrier transport), cross-sectional transmission electron microscopy, and X-ray photoelectron spectroscopy revealed ReLA-induced depth-dependent compositional and structural modifications that tuned the carrier concentration ((0.3 − 1.27) × 1020 cm−3) and epsilon-near-zero domain (3.07−11.7

Item Type:	Article
Additional Information:	Publisher specific licence - The terms are set out at https://opg.optica.org/library/license_v2.cfm#VOR-OA and https://opg.optica.org/submit/review/pdf/CopyrightTransferOpenAccessAgreement-2021-09-20.pdf "Authors and readers may use, reuse, and build upon the article, or use it for text or data mining without asking prior permission from the publisher or the Author(s), as long as the purpose is non-commercial and appropriate attribution is maintained."
Uncontrolled Keywords:	0205 Optical Physics; 1007 Nanotechnology
Identification Number:	https://doi.org/10.1364/ome.464918
Page Range:	p. 4310
SWORD Depositor:	Symplectic Elements
Depositing User:	Symplectic Elements
Date Deposited:	07 Dec 2022 16:43
Last Modified:	08 Dec 2022 08:51
URI:	https://shura.shu.ac.uk/id/eprint/31127

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