TSAKONAS, C, KUZNETSOV, V. L., CRANTON, W. M., KALFAGIANNIS, N., ABUSABEE, K.M., KOUTSOGEORGIS, D.C., ABEYWICKRAMA, N. and EDWARDS, P.P. (2017). Low temperature sputter-deposited ZnO films with enhanced Hall mobility using excimer laser post-processing. Journal of Physics D: Applied Physics, 50 (48).
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Cranton SHURA JPhysD paper Accepted Oct 2017.pdf - Accepted Version Creative Commons Attribution Non-commercial No Derivatives. Download (1MB) | Preview |
Abstract
We report the low temperature (T<70 ºC) fabrication of ZnO thin films (~140 nm) with Hall mobility of up to 17.3 cm2 V-1 s-1 making them suitable for thin film transistor (TFT) applications. The films were deposited by rf magnetron sputtering at T<70 ºC and subsequently laser processed in ambient temperature in order to modify the Hall mobility and carrier concentration. Medium-to-low energy laser radiation densities and a high number of pulses were used to avoid damaging the films. Laser annealing of the films after aging in the lab under 25% - 35% relative humidity and at an average illuminance of 120 lux resulted in an overall higher mobility and relatively low carrier concentration in comparison to the non-aged films that were laser processed immediately after deposition. A maximum overall measured Hall mobility of 17.3 cm2 V-1s-1 at a carrier density of 2.3×1018 cm-3 was measured from a 1 GΩ as deposited and aged film after the laser treatment. We suggest that the aging of non-processed films reduces structural defects mainly at grain boundaries by air species chemisorption, with concomitant increase in thermal conductivity so that laser processing can have an enhancing effect. Such a processing combination can act synergistically and produce suitable active layers for TFT applications with low temperature processing requirements.
Item Type: | Article |
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Research Institute, Centre or Group - Does NOT include content added after October 2018: | Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre |
Departments - Does NOT include content added after October 2018: | Faculty of Science, Technology and Arts > Department of Engineering and Mathematics |
Identification Number: | https://doi.org/10.1088/1361-6463/aa9316 |
Depositing User: | Wayne Cranton |
Date Deposited: | 27 Oct 2017 08:56 |
Last Modified: | 18 Mar 2021 08:01 |
URI: | https://shura.shu.ac.uk/id/eprint/17141 |
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