Stress and texture in HIPIMS TiN thin films

MACHUNZE, R., EHIASARIAN, A. P., TICHELAAR, F. D. and JANSSEN, G. (2009). Stress and texture in HIPIMS TiN thin films. Thin Solid Films, 518 (5), 1561-1565.

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Titanium nitride (TiN) films in the thickness range of 0.013 mu m to 0.3 pm were grown by high power impulse magnetron sputtering (HIPIMS) on silicon substrates in two deposition modes: a) the substrate was grounded and b) - 125 V bias was applied to the substrate. On the films we performed microstructure-, film texture- and film stress-analysis. The films deposited under - 125 V bias experienced a more energetic ion bombardment than the films deposited on grounded substrates. This difference in ion bombardment energy is reflected in the different microstructure. In contrast to previous results for TiN films grown by conventional reactive magnetron sputtering, we observe no major film stress gradient for increasing film thicknesses. We explain this observation from the absence of a 200-to-111 texture crossover during film growth. A moderate ion bombardment leads to TiN films with (111) texture. while an intense ion bombardment leads to films with (001) texture (Greene et all.: Appl. Phys. Lett. 67 (20) 2928-2930 (1995)). At the same time (001) oriented grains are much more susceptible to compressive stress generation by ion bombardment than (111) oriented grains. (C) 2009 Elsevier B.V. All rights reserved.

Item Type: Article
Additional Information: 36th International Conference on Metallurgical Coatings and Thin Films APR 27-MAY 01, 2009 San Diego, CA
Identification Number:
Page Range: 1561-1565
Depositing User: Ann Betterton
Date Deposited: 23 Feb 2010 17:17
Last Modified: 18 Mar 2021 21:30

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