Ion energy distributions and efficiency of sputtering process in HIPIMS system

BURCALOVA, K., HECIMOVIC, A. and EHIASARIAN, A. P. (2008). Ion energy distributions and efficiency of sputtering process in HIPIMS system. Journal of Physics D: Applied Physics, 41 (11).

Full text not available from this repository.
Link to published version::


High-power impulse magnetron sputter deposition of metallic films was investigated. Time-averaged mass spectroscopy was performed to provide information on the energy distribution of individual ions and the composition of total ion fluxes over a wide range of deposition conditions. Chromium and niobium targets were used, the repetition frequency was 50 Hz and 60 Hz, respectively, and argon pressures were 0.29 Pa and 2.7 Pa. The strong effect of the working gas pressure on the ion energy distribution was shown. For low pressure (0.29 Pa) the metal ion energy distribution reveals a significant high energy tail (up to 20 eV). It was also shown that the increase in the average pulse current results in a higher fraction of metal ions in the total ion flux. Argon ions were dominant over niobium ions, while chromium ions became dominant in the total ion flux onto the substrate at high values of target power loading. At a high pressure (2.7 Pa), the high energy tail of metal ion energy distribution became negligible. Film deposition experiments showed that the efficiency of the sputtering process and particle transport to the substrate decreased with increasing target power loading.

Item Type: Article
Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Nanotechnology Centre for PVD Research
Identification Number:
Depositing User: Ann Betterton
Date Deposited: 18 Feb 2010 16:55
Last Modified: 18 Mar 2021 10:00

Actions (login required)

View Item View Item


Downloads per month over past year

View more statistics