On the structure and composition of nanoscale TiAIN/VN multilayers

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ZHOU, Z., RAINFORTH, W. M., FALKE, U., FALKE, M., BLELOCH, A. and HOVSEPIAN, P. E. (2007). On the structure and composition of nanoscale TiAIN/VN multilayers. Philosophical Magazine, 87 (6), 967-978. [Article]

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Abstract

The chemical and physical structure of a TiAlN/VN multilayer, of average layer thickness 3.4 +/- 0.4nm, was characterized using a spherical aberration-corrected STEM, utilizing a nominal 0.1-nm beam, by HAADF and EELS. The interface between layers was shown to be rough, with local thickness variations evident in layer thickness. Chemical mixing between layers was identified, consistent with numerical modelling of the deposition flux and layer growth. The implications of the compositional modulation are discussed.

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Research Institute, Centre or Group - Does NOT include content added after October 2018:

Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Nanotechnology Centre for PVD Research

Page Range:

967-978

Identifiers

Identification Number:

10.1080/14786430601019433

ORCID:

https://orcid.org/0000-0002-1047-0407