Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings

HOVSEPIAN, P. E. and MUNZ, W. D. (2002). Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings. Vacuum, 69 (1-3), 27-36.

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    The paper describes the properties of superlattice structured PVD coatings dedicated to high-temperature performance: TiAlCrN/TiAlYN (period 1.7 nm), TiAlN/CrN (period 3.8 nm), to tribological applications: TiAlN/VN (period 3.0 rim), C/Cr (period 1.6 nm) and combined wear and corrosion resistance CrN/NbN (period 3.4 nm). The coatings have been deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique. Some technological details from the production process of the superlattice coatings in large scale are given and results from the performance of these novel PVD coatings in various industrial applications are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.

    Item Type: Article
    Additional Information: 12th International School on Vacuum, Electron and Ion Technologies SEP 17-21, 2001 VARNA, BULGARIA
    Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
    Identification Number:
    Page Range: 27-36
    Depositing User: Ann Betterton
    Date Deposited: 17 Feb 2010 15:10
    Last Modified: 18 Mar 2021 13:19

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