Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings

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HOVSEPIAN, P. E. and MUNZ, W. D. (2002). Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings. Vacuum, 69 (1-3), 27-36. [Article]

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Abstract

The paper describes the properties of superlattice structured PVD coatings dedicated to high-temperature performance: TiAlCrN/TiAlYN (period 1.7 nm), TiAlN/CrN (period 3.8 nm), to tribological applications: TiAlN/VN (period 3.0 rim), C/Cr (period 1.6 nm) and combined wear and corrosion resistance CrN/NbN (period 3.4 nm). The coatings have been deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique. Some technological details from the production process of the superlattice coatings in large scale are given and results from the performance of these novel PVD coatings in various industrial applications are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.

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Official URL:

https://www.sciencedirect.com/science/article/pii/...

Additional Information:

12th International School on Vacuum, Electron and Ion Technologies SEP 17-21, 2001 VARNA, BULGARIA

Research Institute, Centre or Group - Does NOT include content added after October 2018:

Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Nanotechnology Centre for PVD Research

Page Range:

27-36

Identifiers

Identification Number:

10.1016/S0042-207X(02)00305-6