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Jump to: 2001
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2001

EHIASARIAN, Arutiun, MACAK, K. A., SCHONJAHN, C., NEW, Roger and MUNZ, W. D. (2001). Characterization of arc discharge plasmas in the combined steered arc/unbalanced magnetron deposition process. Annual Technical Conference of the Society of Vacuum Coaters. Proceedings., 44, 382-387. [Article]

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