Items where Author is "Yukimura, K."

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Article

YUKIMURA, K. and EHIASARIAN, A. P. (2009). Generation of RF plasma assisted high power pulsed sputtering glow discharge without using a magnetic field. Nuclear Instruments and Methods in Physics Research. Section B-Beam Interactions with Materials and Atoms, 267 (8-9), 1701-1704.

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