Low temperature remote plasma sputtering of indium tin oxide for flexible display applications

WAKEHAM, S. J., THWAITES, M. J., HOLTON, B. W., TSAKONAS, C., CRANTON, Wayne, KOUTSOGEORGIS, D. C. and RANSON, R. (2009). Low temperature remote plasma sputtering of indium tin oxide for flexible display applications. Thin Solid Films, 518 (4), 1355-1358.

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Official URL: http://www.scopus.com/inward/record.url?eid=2-s2.0...
Link to published version:: https://doi.org/10.1016/j.tsf.2009.04.072
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    Item Type: Article
    Additional Information: Cited By (since 1996):19 ID=177
    Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Thin Films Research Centre > Electronic Materials and Sensors Research Group
    Identification Number: https://doi.org/10.1016/j.tsf.2009.04.072
    Page Range: 1355-1358
    Depositing User: Wayne Cranton
    Date Deposited: 01 Jun 2016 13:55
    Last Modified: 18 Mar 2021 19:15
    URI: http://shura.shu.ac.uk/id/eprint/8057

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