Low temperature remote plasma sputtering of indium tin oxide for flexible display applications

WAKEHAM, S. J., THWAITES, M. J., HOLTON, B. W., TSAKONAS, C., CRANTON, Wayne, KOUTSOGEORGIS, D. C. and RANSON, R. (2009). Low temperature remote plasma sputtering of indium tin oxide for flexible display applications. Thin Solid Films, 518 (4), 1355-1358.

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Official URL: http://www.scopus.com/inward/record.url?eid=2-s2.0...
Link to published version:: 10.1016/j.tsf.2009.04.072
Item Type: Article
Additional Information: Cited By (since 1996):19 ID=177
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Electronic Materials and Sensors Research Group
Identification Number: 10.1016/j.tsf.2009.04.072
Depositing User: Wayne Cranton
Date Deposited: 01 Jun 2016 13:55
Last Modified: 01 Jun 2016 13:55
URI: http://shura.shu.ac.uk/id/eprint/8057

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