Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics

CRANTON, W. M., WILSON, S. L., RANSON, R., KOUTSOGEORGIS, D. C., CHI, K., HEDGLEY, R., SCOTT, J., LIPIEC, S., SPILLER, A. and SPEAKMAN, S. (2007). Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics. Thin Solid Films, 515 (24 SPE), 8534-8538.

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Official URL: http://www.scopus.com/inward/record.url?eid=2-s2.0...
Link to published version:: 10.1016/j.tsf.2007.03.118

Abstract

The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20–100 mJ cm− 2 reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions.

Item Type: Article
Additional Information: Cited By (since 1996):16 ID=181
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Electronic Materials and Sensors Research Group
Identification Number: 10.1016/j.tsf.2007.03.118
Depositing User: Wayne Cranton
Date Deposited: 15 Feb 2016 15:41
Last Modified: 15 Feb 2016 15:41
URI: http://shura.shu.ac.uk/id/eprint/8007

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