CRANTON, W. M., SPINK, D. M., STEVENS, R. and THOMAS, C. B. (1993). Growth and dielectric characterization of yttrium oxide thin films deposited on Si by r.f.-magnetron sputtering. Thin Solid Films, 226 (1), 156-160.
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Official URL: http://www.sciencedirect.com/science/article/pii/0...
Link to published version:: https://doi.org/10.1016/0040-6090(93)90222-B
Item Type: | Article |
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Additional Information: | Cited By (since 1996):47 ID=209 |
Research Institute, Centre or Group - Does NOT include content added after October 2018: | Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Electronic Materials and Sensors Research Group |
Identification Number: | https://doi.org/10.1016/0040-6090(93)90222-B |
Page Range: | 156-160 |
Depositing User: | Wayne Cranton |
Date Deposited: | 15 Feb 2016 15:45 |
Last Modified: | 18 Mar 2021 23:00 |
URI: | https://shura.shu.ac.uk/id/eprint/8004 |
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