Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering

LEWIN, Erik, LOCH, Daniel, MONTAGNE, Alex, EHIASARIAN, Arutiun P. and PATSCHEIDER, Jörg (2013). Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering. Surface and coatings technology, 232, 680-689.

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Official URL: http://dx.doi.org/10.1016/j.surfcoat.2013.06.076
Link to published version:: https://doi.org/10.1016/j.surfcoat.2013.06.076
Related URLs:
    Item Type: Article
    Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Thin Films Research Centre
    Identification Number: https://doi.org/10.1016/j.surfcoat.2013.06.076
    Page Range: 680-689
    Depositing User: Jill Hazard
    Date Deposited: 10 Mar 2014 09:54
    Last Modified: 13 Jun 2017 13:14
    URI: http://shura.shu.ac.uk/id/eprint/7824

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