High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

EHIASARIAN, Arutiun, HECIMOVIC, A., DE LOS ARCOS, T., NEW, Roger, DER GATHEN, V. Schulz-von, BOKE, M. and WINTER, J. (2012). High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization. Applied Physics Letters, 100 (11), p. 114101.

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Link to published version:: https://doi.org/10.1063/1.3692172
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    Abstract

    We report on instabilities in high power impulse magnetron sputtering plasmas which are likely to be of the generalized drift wave type. They are characterized by well defined regions of high and low plasma emissivity along the racetrack of the magnetron and cause periodic shifts in floating potential. The azimuthal mode number m depends on plasma current, plasma density, and gas pressure. The structures rotate in × direction at velocities of ∼10 km s−1 and frequencies up to 200 kHz. Collisions with residual gas atoms slow down the rotating wave, whereas increasing ionization degree of the gas and plasma conductivity speeds it up.

    Item Type: Article
    Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
    Identification Number: https://doi.org/10.1063/1.3692172
    Page Range: p. 114101
    Depositing User: Arutiun Ehiasarian
    Date Deposited: 28 Mar 2012 09:07
    Last Modified: 18 Mar 2021 04:34
    URI: http://shura.shu.ac.uk/id/eprint/4921

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