EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering

SEABOURNE, C. R., ROSS, I, M., RAINFORTH, W. M., SCOTT, A. J., MENDIS, B. G. and HOVSEPIAN, P. (2010). EELS and ELNES studies of nano-scale nitride multilayers deposited by unbalanced magnetron sputtering. Journal of Physics: Conference Series, 241, 012046.

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Link to published version:: https://doi.org/10.1088/1742-6596/241/1/012046
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    Abstract

    High spatial resolution chemical analysis and imaging of a CrAlYN/CrN multi-layer coating was performed using sub-nanometer probe electron energy loss spectroscopy in a spherical aberration corrected scanning transmission electron microscope. Analysis indicated the CrN layers to be near stoichiometric with a relative Cr/N ratio of 1.050.1 while the CrAlYN layers gave a Cr/N ratio of 0.590.02. Analysis of the energy loss near edge structure at the nitrogen K-edge was performed. The experimentally determined fine edge structure in electron energy loss spectra were compared with theoretically determined spectra, calculated using electron density functional theory. For the CrN layers the best match between the direct experimental analysis and the simulated edges corresponds to stoichometric CrN consistent with the quantitative analysis while the best match for the CrAlYN layers was to (Cr0.5Al 0.5)N.

    Item Type: Article
    Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
    Identification Number: https://doi.org/10.1088/1742-6596/241/1/012046
    Page Range: 012046
    Depositing User: Ann Betterton
    Date Deposited: 20 Jan 2011 10:21
    Last Modified: 10 Oct 2018 13:36
    URI: http://shura.shu.ac.uk/id/eprint/2998

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