Spatial and temporal evolution of ion energies in high power impulse magnetron sputtering plasma discharge

HECIMOVIC, A. and EHIASARIAN, A. P. (2010). Spatial and temporal evolution of ion energies in high power impulse magnetron sputtering plasma discharge. Journal of Applied Physics, 108 (6), 063301.

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Link to published version:: 10.1063/1.3486018

Abstract

High power impulse magnetron sputtering (HIPIMS) is a novel deposition technology successfully implemented on full scale industrial machines. HIPIMS utilizes short pulses of high power delivered to the target in order to generate high amount of metal ions. The life-span of ions between the pulses and their energy distribution could strongly influence the properties and characteristics of the deposited coating. In modern industrial coating machines the sample rotates on a substrate holder and changes its position and distance with regard to the magnetron. Time resolved measurements of the ion energy distribution function (IEDF) at different distances from the magnetron have been performed to investigate the temporal evolution of ions at various distances from target. The measurements were performed using two pressures, 1 and 3 Pa to investigate the influence of working gas pressure on IEDF. Plasma sampling energy-resolved mass spectroscopy was used to measure the IEDF of Ti1+, Ti 2+, Ar1+, and Ar2+ ions in HIPIMS plasma discharge with titanium (Ti) target in Ar atmosphere. The measurements were done over a full pulse period and the distance between the magnetron and the orifice of the mass spectrometer was changed from 25 to 215 mm. © 2010 American Institute of Physics.

Item Type: Article
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number: 10.1063/1.3486018
Depositing User: Ann Betterton
Date Deposited: 24 Nov 2010 13:31
Last Modified: 24 Nov 2010 13:31
URI: http://shura.shu.ac.uk/id/eprint/2746

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