The distribution of transit times in a magnetically steered cathodic arc

WALKE, P. J., NEW, R. and CARE, C. M. (1994). The distribution of transit times in a magnetically steered cathodic arc. Surface and Coatings Technology, 68, 352-358.

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Link to published version:: 10.1016/0257-8972(94)90185-6

Abstract

An electromagnetic system of coils capable of steering the cathode spot of a vacuum are has been implemented. The radius of the are track, and the velocity and confinement of the spot are controllable by suitable choice of coil currents. Measurements have been made on a range of cathode materials of the statistical distribution of the transit times of the orbiting spot. The measured distributions have been compared with predictions made from a stochastic model of steered are motion. Results are consistent with the model and with random are measurements of other authors.

Item Type: Article
Additional Information: 21st International Conference on Metallurgical Coatings and Thin Films. APR 25-29, 1994, SAN DIEGO, CA
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number: 10.1016/0257-8972(94)90185-6
Depositing User: Ann Betterton
Date Deposited: 17 May 2010 17:18
Last Modified: 17 May 2010 17:18
URI: http://shura.shu.ac.uk/id/eprint/2087

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