Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

LUO, Quanshun and YANG, Shicai (2017). Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings. Coatings, 7 (8), 128-18. [Article]

Documents
16586:224376
[thumbnail of Luo2017_Uncertainty of XRD technique in measuring residual stress of PVD coatings.pdf]
Preview
PDF
Luo2017_Uncertainty of XRD technique in measuring residual stress of PVD coatings.pdf - Published Version
Available under License Creative Commons Attribution.

Download (5MB) | Preview
Abstract
Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic elastic modulus, on the measured residual stress values. A magnetron sputtered TiN grown on hardened tool steel was employed as the sample coating, to measure its residual stress using various diffraction peaks from {111} to {422} acquired at a range of incident glancing angles from 2° to 35°. The results were interpreted in terms of the effective X-ray penetration depth, which has been found to be determined predominantly by the incident glancing angle. In the d-sin2 ψ mode, the results present an approximate residual stress over a depth of effective X-ray penetration, and it is recommended to use a diffraction peak of high-index lattice plane from {311} to {422}. The GIXRD mode helps determine a depth profile of residual stress, since the measured residual stress depends strongly on the X-ray penetration. In addition, the anisotropy of elastic modulus shows limited influence on the calculated residual stress value.
More Information
Statistics

Downloads

Downloads per month over past year

View more statistics

Metrics

Altmetric Badge

Dimensions Badge

Share
Add to AnyAdd to TwitterAdd to FacebookAdd to LinkedinAdd to PinterestAdd to Email

Actions (login required)

View Item View Item