Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

LUO, Quanshun and YANG, Shicai (2017). Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings. Coatings, 7 (8), 128-18.

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Official URL: http://www.mdpi.com/2079-6412/7/8/128/notes
Link to published version:: https://doi.org/10.3390/coatings7080128
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Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic elastic modulus, on the measured residual stress values. A magnetron sputtered TiN grown on hardened tool steel was employed as the sample coating, to measure its residual stress using various diffraction peaks from {111} to {422} acquired at a range of incident glancing angles from 2° to 35°. The results were interpreted in terms of the effective X-ray penetration depth, which has been found to be determined predominantly by the incident glancing angle. In the d-sin2 ψ mode, the results present an approximate residual stress over a depth of effective X-ray penetration, and it is recommended to use a diffraction peak of high-index lattice plane from {311} to {422}. The GIXRD mode helps determine a depth profile of residual stress, since the measured residual stress depends strongly on the X-ray penetration. In addition, the anisotropy of elastic modulus shows limited influence on the calculated residual stress value.

Item Type: Article
Additional Information: This article belongs to the Special Issue Mechanical Behavior of Coatings and Engineered Surfaces
Research Institute, Centre or Group - Does NOT include content added after October 2018: Materials and Engineering Research Institute > Materials Analysis and Research Services
Identification Number: https://doi.org/10.3390/coatings7080128
Page Range: 128-18
Depositing User: Quanshun Luo
Date Deposited: 24 Aug 2017 07:48
Last Modified: 18 Mar 2021 04:07
URI: https://shura.shu.ac.uk/id/eprint/16586

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