Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

SHARP, J, MULLER, I Castillo, MANDAL, P, ABBAS, A, WEST, G, RAINFORTH, W M, EHIASARIAN, Arutiun and HOVSEPIAN, Papken (2015). Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings. Journal of Physics: Conference Series, 644, 012011.

Ehiasarian and Hovsepian - Cross sectional TEM.pdf - Published Version
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Link to published version:: 10.1088/1742-6596/644/1/012011


A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.

Item Type: Article
Additional Information: Electron Microscopy and Analysis Group Conference (EMAG2015)
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number: 10.1088/1742-6596/644/1/012011
Depositing User: Margaret Boot
Date Deposited: 05 Sep 2016 10:35
Last Modified: 20 Oct 2016 00:19

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