On the structure and composition of nanoscale TiAIN/VN multilayers

ZHOU, Z., RAINFORTH, W. M., FALKE, U., FALKE, M., BLELOCH, A. and HOVSEPIAN, P. E. (2007). On the structure and composition of nanoscale TiAIN/VN multilayers. Philosophical Magazine, 87 (6), 967-978.

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Abstract

The chemical and physical structure of a TiAlN/VN multilayer, of average layer thickness 3.4 +/- 0.4nm, was characterized using a spherical aberration-corrected STEM, utilizing a nominal 0.1-nm beam, by HAADF and EELS. The interface between layers was shown to be rough, with local thickness variations evident in layer thickness. Chemical mixing between layers was identified, consistent with numerical modelling of the deposition flux and layer growth. The implications of the compositional modulation are discussed.

Item Type:	Article
Research Institute, Centre or Group:	Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number:	10.1080/14786430601019433
Depositing User:	Ann Betterton
Date Deposited:	16 Feb 2010 15:18
Last Modified:	16 Feb 2010 15:18
URI:	http://shura.shu.ac.uk/id/eprint/1158

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