Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings

HOVSEPIAN, P. E. and MUNZ, W. D. (2002). Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings. Vacuum, 69 (1-3), 27-36.

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Abstract

The paper describes the properties of superlattice structured PVD coatings dedicated to high-temperature performance: TiAlCrN/TiAlYN (period 1.7 nm), TiAlN/CrN (period 3.8 nm), to tribological applications: TiAlN/VN (period 3.0 rim), C/Cr (period 1.6 nm) and combined wear and corrosion resistance CrN/NbN (period 3.4 nm). The coatings have been deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique. Some technological details from the production process of the superlattice coatings in large scale are given and results from the performance of these novel PVD coatings in various industrial applications are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.

Item Type:	Article
Additional Information:	12th International School on Vacuum, Electron and Ion Technologies SEP 17-21, 2001 VARNA, BULGARIA
Research Institute, Centre or Group:	Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number:	10.1016/S0257-8972(00)00959-2
Depositing User:	Ann Betterton
Date Deposited:	17 Feb 2010 15:10
Last Modified:	17 Feb 2010 15:10
URI:	http://shura.shu.ac.uk/id/eprint/1120

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