Chromium nitride/niobium nitride superlattice coatings deposited by combined cathodic-arc/unbalanced magnetron technique

HOVSEPIAN, P. E., LEWIS, D. B., MUUNZ, W. D., ROUZAUD, A. and JULIET, P. (1999). Chromium nitride/niobium nitride superlattice coatings deposited by combined cathodic-arc/unbalanced magnetron technique. Surface and Coatings Technology, 116, 727-734.

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Link to published version:: 10.1016/S0257-8972(99)00182-6

Abstract

CrN/NbN superlattice coatings have been developed as an attempt to replace electroplated chromium in some applications. The coatings have been deposited by a combined cathodic-arc/unbalanced magnetron technique in an industrial-size physical vapour deposition (PVD) coater. The investigations have been focused on the question of maximum hardness, adhesion and tribological performance of the coatings deposited at 400 degrees C as a function of the nitrogen content in the films. All CrN/NbN superlattice coatings produced exhibit a single-phase face-centred cubic structure and {200} preferred orientation. The superlattice period of the coatings varies in the range Delta = 3.4-7.4 nm depending on the N-2 flow rate. Under the sputtering conditions used, it was possible for stoichiometric CrN/NbN coatings to be deposited only in a narrow N-2 flow rate range of around 160 seem. Both stoichiometric and sub-stoichiometric coatings showed maximum hardness values of Hk = 3580 and Hk = 3600, respectively. CrN/NbN superlattice coatings outperformed electroplated chromium by factor of 13 in dry sliding conditions. However, both coatings show similar abrasive wear in the range of 0.63 mu m N-1. Stoichiometric CrN/NbN superlattice coatings possess high oxidation resistance in the range 820-850 degrees C. (C) 1999 Elsevier Science S.A. All rights reserved.

Item Type: Article
Additional Information: 6th International Conference on Plasma Surface Engineering (PSE 98) SEP 14-18, 1998 GARMISCH PARTENKI, GERMANY
Research Institute, Centre or Group: Materials and Engineering Research Institute > Thin Films Research Centre > Nanotechnology Centre for PVD Research
Identification Number: 10.1016/S0257-8972(99)00182-6
Depositing User: Ann Betterton
Date Deposited: 15 Feb 2010 14:04
Last Modified: 15 Feb 2010 14:08
URI: http://shura.shu.ac.uk/id/eprint/1118

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