Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

SHARP, J, MULLER, I Castillo, MANDAL, P, ABBAS, A, WEST, G, RAINFORTH, W M, EHIASARIAN, Arutiun and HOVSEPIAN, Papken (2015). Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings. Journal of Physics: Conference Series, 644, 012011.

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Abstract

A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.

Item Type:	Article
Additional Information:	Electron Microscopy and Analysis Group Conference (EMAG2015)
Research Institute, Centre or Group - Does NOT include content added after October 2018:	Materials and Engineering Research Institute > Advanced Coatings and Composites Research Centre > Nanotechnology Centre for PVD Research
Identification Number:	https://doi.org/10.1088/1742-6596/644/1/012011
Page Range:	012011
Depositing User:	Margaret Boot
Date Deposited:	05 Sep 2016 10:35
Last Modified:	18 Mar 2021 04:10
URI:	https://shura.shu.ac.uk/id/eprint/13233

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